Capacitance sensors are noncontact sensors used in machine tools to measure the distance between a noncontact probe and a target sensor. Because the probe does not physically touch the target, capacitance sensors are beneficial in instances where the target surface is moving, such as a rotating spindle, or delicate, such as a silicon wafer.
Imported from the CTE archive to seed discussion on MFGAxis.
Originally published on CTE: 2015-01-15
CTE source: https://ctemag.com/articles/measuring-capacitance-sensors/
Legacy path: /articles/measuring-capacitance-sensors